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1.2 um厚みのポジレジストを持ちいて、1.1umの解像度を得た。
The aligner has 1.1 um resolution ability when using a 1.2 um thickness positive photoresist.
用1.2um厚的正光刻胶,得到了1.1um的分辨率。

The microscopic photos of the results for 10, 5 and 2 um line/space patterns. The thickness of the positive photoresist AZ5214 has been verified using stylus measurement.

The microscopic photos of the results for 1.8, 1.6, 1.5 and 1.4 um line/space patterns.

The microscopic photos of the results for 1.3, 1.2, 1.1 and 1 um line/space patterns.

The resolution of our mask aligner is 1.1 um.